Variation of irregular structures in MEMS Arrays for minimizing interaction phenomena with light (View)

• Applicant: Professor Dr. Hartmut Hillmer
• Subject Area: Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering ; Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
• Term: since 2022
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 509885786

Arrays with millions of MEMS micromirrors enable to modulate and guide light via electrostatic actuation. Light waves passing through arrays of periodic microstructures of identical orientation, e.g. in windows or glass facades of buildings, lead to light diffraction and ghost images, which might disturb the clear view through the window. A distinct improvement should be obtained via structures which are as irregular as possible, regarding their individual shape, size and orientation. Freeforms, different elevation angles and hinge orientations will be applied. In addition, the UV resistance and color neutrality will be investigated. Various arrays differing in the above-mentioned details will be simulated, designed, implemented technologically and characterized experimentally.

• DFG Programme: Research Grants