Fibre PROES - a diagnostic for knowledge based development and monitoring of industrial plasma processes via Phase Resolved Optical Emission Spectroscopy (T09#)

• Subject Area: Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
• Term: since 2023
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 138690629

Most applications of technological plasmas are developed empirically in an inefficient way. For efficient knowledge based process development, access to the dynamics of energetic electrons is required to understand and control the production of process relevant particle species (ions/radicals). Such access is provided by Phase Resolved Optical Emission Spectroscopy (PROES), which requires large optical access to the plasma and expensive ICCD cameras. In this project, a new industry compatible and cheap version, Fibre PROES, is developed based on optical fibres and photo-multipliers. Jointly with SENTECH Instruments and based on a combination of experiments and simulations, Fibre PROES is developed from the concept level to an automated system and is tested at several plasma sources and processes.

• DFG Programme: CRC/Transregios (Transfer Project)
• Subproject of: TRR 87: Pulsed High Power Plasmas for the Synthesis of Nanostructural Functional Layers
• Applicant Institution: Ruhr-Universität Bochum
• Business and Industry: SENTECH Instruments GmbH
• Project Heads: Dr. Ihor Korolov; Professor Dr. Julian Schulze