ParaCoat - Development of PECVD processes to reduce system contamination and process ageing (T10#)

• Subject Area: Coating and Surface Technology
• Term: from 2023 to 2026
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 138690629

No abstract available

• DFG Programme: CRC/Transregios (Transfer Project)
• Subproject of: TRR 87: Pulsed High Power Plasmas for the Synthesis of Nanostructural Functional Layers
• Applicant Institution: Ruhr-Universität Bochum
• Project Head: Professor Dr. Rainer Dahlmann