Neue Technologieplattform für die "Oberflächennahe Silizium-bulk-Mikromechanik" (C 02)

• Subject Area: Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
• Term: from 1995 to 2006
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 5479322

No abstract available

• DFG Programme: Collaborative Research Centres
• Subproject of: SFB 379: Micromechanical Sensor and Actuator Arrays
• Applicant Institution: Technische Universität Chemnitz
• Project Head: Professor Dr. Thomas Geßner (†)