Project Details
Projekt
Rechnergestützter Entwurf von anisotrop geätzten Mikrostrukturen (D 1)
Subject Area
Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
Term
from 1997 to 2000
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 5481479
No abstract available
DFG Programme
Collaborative Research Centres
Subproject of
SFB 438:
Mathematical Modelling, Simulation and Verification in Material Related Processes and Intelligent Systems
Applicant Institution
Technische Universität München (TUM)
Project Head
Professor Dr. Gerhard K.M. Wachutka
