Lithografie-Nanotools (A 3)

• Subject Area: Microsystems
• Term: from 2002 to 2005
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 5485337

No abstract available

• DFG Programme: Collaborative Research Centres
• Subproject of: SFB 622: Nanopositioning- and Nanomeasuring Machines
• Applicant Institution: Technische Universität Ilmenau
• Project Heads: Professor Dr.-Ing. Theodor Doll; Privatdozent Dr.-Ing. Frank Schwierz