Project Details
Projekt
Herstellung von "Silicon-On-Insulator"-Schichten durch Ionenimplantation bei geringen Dosen in Kombination mit anschließenden Plasmabehandlungen
Applicant
Professor Dr.-Ing. John Thomas Horstmann
Subject Area
Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
Term
from 2003 to 2008
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 5401297
No abstract available
DFG Programme
Research Grants
