A liquid metal arc plasma source for the high-rate deposition of wide bandgap semiconductor films

• Applicants: Professor Dr. André Anders; Dmitry Kalanov, Ph.D.
• Subject Area: Synthesis and Properties of Functional Materials
• Term: since 2025
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 562781822

No abstract available

• DFG Programme: New Instrumentation for Research