Advancement of kinetically-based evaluation algorithms for active plasma resonance spectroscopy and their transfer to industrial practice

• Applicants: Professor Dr. Ralf-Peter Brinkmann; Dr. Denis Eremin; Professor Dr.-Ing. Jens Oberrath
• Subject Area: Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
• Term: since 2025
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 564134135

The monitoring and control of technical plasmas are essential to ensure process quality, maximize resource efficiency, and reduce operating costs. This requires precise measurements of key internal state variables, particularly electron density and electron temperature. A promising concept for industrially compatible diagnostics of plasma processes is Active Plasma Resonance Spectroscopy (APRS). This method enables real-time diagnostics of plasma processes and is therefore a key factor for digitalization and automation in line with the principles of Industry 4.0. APRS relies on the universal property of all low-pressure plasmas to exhibit pronounced resonance when excited with high-frequency signals. The resonance frequency provides a measure of the electron density, while the resonance width allows conclusions about the electron temperature.The planned project aims to develop innovative, kinetically based evaluation algorithms for APRS and transfer them into industrial applications. The focus is on designing and applying kinetically grounded evaluation methods for the Multipole Resonance Probe (MRP) and its planar variant (PMRP). In the long term, the project seeks to establish a technological foundation that enhances the efficiency and precision of industrial plasma diagnostics while aligning with Industry 4.0 principles—automation and digitalization.The collaboration between two academic institutions (the Chair of Theoretical Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Ruhr University Bochum, and the Modeling and Simulation Group, Faculty of Electrical Energy Technology, South Westphalia University of Applied Sciences, Soest) and an innovative start-up company (House of Plasma GmbH) ensures an effective transfer of research results into practical applications.

• DFG Programme: Research Grants (Transfer Project)
• Application Partner: House of Plasma GmbH