Reactive Ion Etcher (RIE)

• Subject Area: Electrical Engineering and Information Technology
• Term: since 2026
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 568740253

No abstract available

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Reactive Ion Etcher
• Applicant Institution: Technische Universität München (TUM)
• Leader: Professor Dr.-Ing. Markus Becherer