Project Details
Projekt
Laser Doppler Vibrometer (VIB)
Subject Area
Electrical Engineering and Information Technology
Term
Funded in 2026
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 568740385
The laser Doppler vibrometer (VIB) enables holistic, broadband, true real-time analysis of micro-electromechanical sensors and actuators (MEMS), other moving microstructures, and biological samples. The vibration, out of plane as well as in plane, is recorded in high resolution under software control and analyzed as an integrated data set. The amplitude resolution in the sub-picometer range, typical of laser vibrometers, is achieved regardless of the vibration direction. The measuring device allows an analysis of the dynamic behavior of the microstructures in the time and frequency domain. A white light interferometer for extremely precise (sub-picometer-range) surface profilometry of static microstructures with high lateral resolution is included as well, which offers an even broader range of applications. The system is embedded in the Central Electronics and Information Technology Laboratory (ZEITlab) at the Technical University of Munich (TUM). The ZEITlab is an organizational unit of the School of Computation, Information and Technology (SoCIT). Since 2022, it has been housed in the new TUM Electrical Engineering and Information Technology building on the Garching campus. The center consists of a clean room with an area of 950 m² and associated characterization laboratories. Its vision is to establish a "makerspace for microelectronics prototypes" that supports a wide range of research areas as a broad-based technology center of SoCIT. In the ZEITlab, proof-of-concept demonstrators in the field of electronics and sensor technology are realized on the basis of modern materials and components and made available for various fields of application. This type of "rapid prototyping" uses innovative processing and characterization technologies and is systematically supplemented by circuit design and modelling. ZEITlab provides a central and shared access to micro- and nanofabrication for a large number of research groups working on topics such as quantum and sensor technologies, micro-, opto-, and neuroelectronics, as well as hybrid nanosystems. The bundled infrastructure, therefore, enables an efficient transfer of technologies from basic research to engineering issues and applications.
DFG Programme
Major Research Instrumentation
Major Instrumentation
Laser Doppler Vibrometer
Applicant Institution
Technische Universität München (TUM)
