Project Details
Projekt
Xenon Difluoride Etching System (XEF2)
Subject Area
Electrical Engineering and Information Technology
Term
since 2026
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 568740890
No abstract available
DFG Programme
Major Research Instrumentation
Major Instrumentation
Xenon Difluoride Etching System
Applicant Institution
Technische Universität München (TUM)
