Project Details
Projekt
PECVD (Plasma Enhanced Chemical Vapor Deposition)
Subject Area
Systems Engineering
Term
since 2025
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 569152579
No abstract available
DFG Programme
Major Research Instrumentation
Major Instrumentation
PECVD-Beschichtungsanlage
Instrumentation Group
0920 Atom- und Molekularstrahl-Apparaturen
Applicant Institution
Albert-Ludwigs-Universität Freiburg
