Project Details
Projekt
Reactive Magnetron Co-Sputtering System
Subject Area
Chemical Solid State and Surface Research
Term
Funded in 2025
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 569551798
The research group of Prof. Eichhorn investigates the physical principles of energy conversion processes using novel materials and nanostructures with a focus on the direct conversion of sunlight into storable chemical fuels using semiconductor photoelectrodes. A particular interest is on conversion processes at surfaces and interfaces of novel oxynitride and nitride thin films. The synthesis of such homogeneous and compact thin films with controlled material properties will be conducted with the requested system for reactive magnetron sputtering. Therefore, the sputtering system will be equipped with a load lock, a gas dosing system, several magnetron sputtering sources with independent control electronics, a thickness monitor, and a computer control system. Based on the controlled and reproducible thin film synthesis, the group of Prof. Eichhorn aims to generate a clear understanding of the relationship between interface properties, defect characteristics, charge transfer/transport, and the general photoelectrochemical performance of the semiconductor photoelectrodes. For this purpose, microscopy and spectroscopy methods with nanoscale resolution will be applied under (photo)electrochemical operating conditions in addition to macroscale characterization techniques. The gained knowledge will be used for the tailored development of novel semiconductor materials for (photo)electrochemical applications, as well as novel approaches to improve conversion efficiency and material stability under realistic operating conditions.
DFG Programme
Major Research Instrumentation
Major Instrumentation
Reaktives Magnetron Co-Sputtersystem
Instrumentation Group
8330 Vakuumbedampfungsanlagen und -präparieranlagen für Elektronenmikroskopie
Applicant Institution
Technische Universität München (TUM)
