Semi-Automated Modular Probestation with Parameter Analyzer

• Subject Area: Electrical Engineering and Information Technology
• Term: Funded in 2025
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 575378950

The realization and consistent further development of functional devices and systems research at the University of Siegen requires a flexible and intelligently automated metrological infrastructure that can be operated intuitively while being available for interdisciplinary research to a broad group of users. The research areas relevant to this application - sensor technology, materials science, micro- and nanochemistry - focus on the investigation of a wide range of devices and systems, including electronic/memristive/optical/biochemical sensors, electronic ultrahigh-frequency devices as well as the fundamental investigation of novel physical phenomena. The physical acquisition of signals from the internal nodes of a device and chips enables exploration of diverse physical interactions, opening new potentials and applications of nanomaterials as well as the realization of integrated optical circuits for sensing and next generation communication technologies. The modular, flexible, and automated high-end probestation including a parameter analyzer applied for, in this proposal, will allow researchers for manual as well as automated remote-control characterizations providing electrical and photonic excitation. Modular probing options will be available to enable rapid, automated and versatile DC, RF, optical and mm-wave probing of small-scale samples up to 6” wafers. The system will further enable precisely calibrated fiber-coupled optical excitation using various light sources.The probestation system will be operated in a temperature-stabilized cleanroom environment (ISO-4) to ensure maximum probing repeatability and accuracy without temperature-induced mechanical and material-specific drift. This instrument will be operated within the Interdisciplinary Research Centre for Nanoanalytics, Nanochemistry and Cyber-physical Sensor Technology (Hook-Up 08/2025). We will offer the research infrastructure and equipment to the interdisciplinary user community. In addition, this will also be with other DFG-funded Core Facility based on the successfully implemented example of the Siegen based Micro- and Nanoanalytics Facility (MNaF). The immediate spatial proximity between tools and experts of nanotechnology and nanoanalytics will enable the systematic expansion of cutting-edge research on nanoscale structures and devices.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Halbautomatische modulare Probestation mit Parameter-Analyzer
• Instrumentation Group: 2780 Spezielle Meß- und Prüfgeräte für Halbleiter und Röhren (außer 620-659)
• Applicant Institution: Universität Siegen
• Leader: Professor Dr. Bhaskar Choubey