Project Details
Projekt
Electron-beam deposition machine
Subject Area
Condensed Matter Physics
Term
Funded in 2026
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 581474360
The electron beam evaporation system consists of a high vacuum recipient with various integrated thermal, electron-beam and Ion-beam assisted evaporation sources, which can be jointly utilized for realizing high quality dielectric thin films. As a whole, the system will be optimized for the deposition of SiO2, TiO2 and SiN thin films, and also complies with the deposition of thin film metals. The above mentioned dielectrics play an important role in realizing high quality optical microresonators, which we use for our studies of light-matter coupling in quantum materials.
DFG Programme
Major Research Instrumentation
Major Instrumentation
Elektronenstrahl Beschichtungsanlage
Instrumentation Group
8380 Schichtdickenmeßgeräte, Verdampfungs- und Steuergeräte (für Vakuumbedampfung, außer 833)
Applicant Institution
Carl von Ossietzky Universität Oldenburg
