Renewal of a field emission scanning electron microscope

• Subject Area: Materials Engineering
• Term: since 2026
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 584876585

This application provides for the comprehensive technical upgrade and functional expansion of an existing field emission scanning electron microscope (FE-SEM). Even by today's standards, this FE-SEM offers very high resolution, especially at the lowest acceleration voltages, but its electronics are outdated and spare parts have not been available for several years. The upgrade of the device is expected to extend its useful life by at least another ten years. A new purchase would cost four times as much and can be avoided if the application is approved. The functionality of the FE-SEM allows for the non-destructive examination of biological and organic material as well as thinnest layers. It is indispensable for the scientific research work of the applicant working groups. The device's areas of application range from scaffold development for bone remodeling to surface functionalization and surface structuring for research into cross-scale metamaterials. The electron optical column of the FE-REM is to be retained, but its control electronics, the operating console, and the software and hardware for image acquisition and data transmission are to be completely replaced. The device is to be equipped with a 4-quadrant backscattered electron detector with 3D functionality for surface topography investigations, which also enables roughness measurement.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Erneuerung eines Feldemissions-Rasterelektronenmikroskops
• Instrumentation Group: 5120 Rasterelektronenmikroskope (REM)
• Applicant Institution: Technische Universität Dresden
• Leader: Dr.-Ing. Ute Bergmann