Project Details
Person
Professor Dr.-Ing. Michael Vellekoop
Address
Universität Bremen
Fachbereich 01: Physik und Elektrotechnik
Institut für Mikrosensoren, -aktoren und -systeme (IMSAS)
Otto-Hahn-Allee 1
28359 Bremen
- As Applicant
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As Leader
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Completed projects
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3D Laserlithographiesystem (Major Research Instrumentation)
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PVD-Sputteranlage (Major Research Instrumentation)
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Completed projects
