High-precision Pico-AFM for nanometrology and nanofabrication

• Applicant: Professor Dr.-Ing. Eberhard Manske
• Subject Area: Measurement Systems
• Term: from 2015 to 2021
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 274917136

The object of the project is a high-precision Pico-AFM with active probes for high-speed measurements and nanofabrication in large areas. The active cantilevers with thermomechanical actuation, piezoresistive deflection detection and long-lived diamond tips, in combination with the nanopositioning and nanomeasuring machine, offer a high potential for the measurement and inspection of nanostructures with subnanometer resolution within the entire range of motion of the nanomeasuring machine. For high-precision AFM measurements, the traceability of the cantilever deflection is to be guaranteed. This will be achieved by means of the optical pico position detector designed in the first project phase.

• DFG Programme: Research Grants