Wafer-level sensor structure for measurements of the ion energy distribution function and the ion angle distribution function in low-pressure plasmas

• Applicants: Professor Dr.-Ing. Thomas Mussenbrock; Dr.-Ing. Sven Zimmermann
• Subject Area: Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
• Term: from 2017 to 2023
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 335529250

No abstract available

• DFG Programme: Research Grants