Functionalization of Microsystems with Coatings
Final Report Abstract
The production of customized three-dimensional structures in the micro- and nanometer range using micromachining technology with the aid of femtosecond lasers has only been possible for approximately 25 years. A key aspect for applications of this technology in micro-optics, micromechanics, microelectronics, and microchemistry is the ability to modify the surfaces and volumes of the structures obtained using this micromachining technology. Such modifications often require the introduction of metals or metal components into such micro- or nanosystems for numerous applications. The chemical vapour deposition of organometallic compounds (OMCVD) allows metal deposition from the vapour phase without damaging these often highly temperature-sensitive micro- or nanostructured substrates. The main objective of this proposal is, as a first step, to obtain novel, complex, metal-based three-dimensional micro- and nanostructures with sophisticated non-rectilinear geometries using micromachining technology with femtosecond lasers or 3D printers. In a subsequent step, these will be functionalised with interesting metals using OMCVD, thus enabling novel applications in the fields of micro(nano)optics, micro(nano)mechanics, micro(nano)electronics, and micro(nano)chemistry. In a final (working) step, the micro- or nanostructured (hollow) substrate surrounding the geometrically complex three-dimensional metallic deposition structure (can also be referred to as a sacrificial structure/matrix structure/auxiliary structure/negative structure/support structure) is removed/etched away/dissolved, revealing this complex metallic deposition structure as an independent micro- or nanostructure.
Publications
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NANOSYSTEMS WITH COATINGS
J. Wochnowski
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Flexible High-Energy Optics using Coated Hollow Capillaries, MLZ Conference 2022
J. Wochnowski
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Highly Flexible Coated Hollow Capillaries for Synchrotron Radiation XOPT Conference 2022
J. Wochnowski
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Selected Coating Technologies for Modification of Micro- and Nanostructured Materials, ZJUT 2023
J. Wochnowski
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Highly Flexible Coated Hollow Capillaries for Synchrotron Radiation, Denver-X-Ray Conferences 2024
J. Wochnowski
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Highly Flexible Coated Hollow Capillaries for Synchrotron Radiation, SRI Conferences 2024
J. Wochnowski
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Coatings for Micro- and Nanosystems by OMCVD, CAU 2025
J. Wochnowski
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Highly flexible beam guides for high-energy radiation, FRMII@TUM 2025
J. Wochnowski
