3D Microfabricationsystem based on 2-Photon-Polymerisation

• Subject Area: Materials Science
• Term: Funded in 2020
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 440808121

The requested device is necessary in order to combine the expertise of the applicant groups in the fields of 3D structuring of surfaces and functional elements in joint projects and in order to pursue objectives in the individual research of the applicant groups which currently cannot be achieved without the requested device. With the help of two-photon polymerization the high-resolution, precise and additive production of structures of variable geometry would be possible. This allows the production of complex, anisotropic and multifunctional (magnetic, optical) 3D structures. Furthermore, the process of the requested device opens up new fields of application for the applicant groups through miniaturization possibilities, for example in the field of optical metrology or materials technology. In addition, the process enables the precise replication of biological structures in the field of photonic crystals and biomimetic waveguide structures. The requested device offers further advantages in the continuing development of semiconductor integration technology and optically based quantum technology.All this is not possible with the currently available equipment and with the methods established in the applicant groups, which is why the applied device is required for targeted research work in internal cooperations and in the individual working groups. At our university there is no comparable device that can be used for the high-resolution and precise production of complex 3D structures in the sub-micrometer range. The purchase of the device is not a replacement purchase, so that the requested device provides new, promising opportunities in research at our university.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: 3D Mikrofabrikationssystem basierend auf 2-Photononen-Polymerisation
• Instrumentation Group: 0910 Geräte für Ionenimplantation und Halbleiterdotierung
• Applicant Institution: Universität Kassel
• Leader: Professor Dr. Hartmut Hillmer