Subfield adressing of ringshaped MEMS shutter arrays with polygonal structures

• Applicant: Professor Dr. Hartmut Hillmer
• Subject Area: Microsystems
• Term: from 2021 to 2025
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 469360309

No abstract available

Link to the final report

https://doi.org/10.34657/28884