ParaCoat - Development of PECVD processes to reduce system contamination and process ageing (T10#)

• Subject Area: Coating and Surface Technology
• Term: since 2023
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 138690629

Plasma-enhanced chemical vapour deposition (PECVD) offers a wide range of possibilities for the functionalisation of plastics. When generating PECVD layers on the substrate, there is also an undesired coating of system parts. These "parasitic" coatings massively influence the processes, so that short maintenance intervals are necessary to remove these coatings. Within the scope of the proposed transfer project, the parasitic coatings are to be characterised and appropriate countermeasures derived in cooperation with an industrial partner who is active in the field of coating packaging. The findings and measures will significantly increase the process stability of this recycling-friendly technology.

• DFG Programme: CRC/Transregios (Transfer Project)
• Subproject of: TRR 87: Pulsed High Power Plasmas for the Synthesis of Nanostructural Functional Layers
• Applicant Institution: Ruhr-Universität Bochum
• Business and Industry: Ionkraft GmbH; Plasma Electronic GmbH
• Project Head: Professor Dr. Rainer Dahlmann