Project Details
Projekt
Poröse Polymere als low-k Dielektrika für Metallisierungssysteme in der Mikroelektronik
Applicant
Professor Dr. Thomas Geßner (†)
Subject Area
Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
Term
from 2002 to 2007
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 5345999
No abstract available
DFG Programme
Research Grants
