Project Details
Projekt
Synergismen bei der Schichtabscheidung mit gepulsten reaktiven Plasmen (B 05)
Subject Area
Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
Term
from 2003 to 2006
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 5485380
No abstract available
DFG Programme
Collaborative Research Centres
Subproject of
SFB 591:
Universal behaviour of plasmas far from equilibrium: heating, transport and structure formation
Applicant Institution
Ruhr-Universität Bochum
Project Heads
Privatdozent Dr. Johannes Berndt; Professor Dr. Jörg Winter
