Project Details
SFB 516: Design and Manufacturing of Active Micro Systems
Subject Area
Mechanical and Industrial Engineering
Term
from 1998 to 2010
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 5482803
The collaborative research centre 516 establishes a method and component related basis for the design and manufacturing of active micro systems.
One goal is to supply a systematic construction process for active micro systems having regard to modular construction systems with standardized components. Integrated into the design process will be a preventive quality assurance, which refers to functional and production technologic boundary conditions. Hereby the effort for development and tests can be limited and new developments can be made possible from an economic point of view. Furthermore the basics for different production technologies of active micro systems are developed. Not only micro system technologies but also conventional production technologies, such as machining or removal are investigated. This provides flexible operating procedures and makes new materials for use in micro systems available. Closely associated to the manufacturing technologies is the development of novel assembly technologies, which are adapted to the special boundary conditions found in micro assembly. These are especially marked by the high required accuracy, resulting of the extremely small tolerances as well as the altered behavior of micro parts. In this context a further development of production metrology is of high significance. Due to the relative movements between different functional groups found in many applications of active micro systems the behavior of wear and friction of micro components is researched. The intention is to provide a knowledge base for components which serve as guides and bearings of moved elements. On this basis active linear guides for micro systems are developed.
One goal is to supply a systematic construction process for active micro systems having regard to modular construction systems with standardized components. Integrated into the design process will be a preventive quality assurance, which refers to functional and production technologic boundary conditions. Hereby the effort for development and tests can be limited and new developments can be made possible from an economic point of view. Furthermore the basics for different production technologies of active micro systems are developed. Not only micro system technologies but also conventional production technologies, such as machining or removal are investigated. This provides flexible operating procedures and makes new materials for use in micro systems available. Closely associated to the manufacturing technologies is the development of novel assembly technologies, which are adapted to the special boundary conditions found in micro assembly. These are especially marked by the high required accuracy, resulting of the extremely small tolerances as well as the altered behavior of micro parts. In this context a further development of production metrology is of high significance. Due to the relative movements between different functional groups found in many applications of active micro systems the behavior of wear and friction of micro components is researched. The intention is to provide a knowledge base for components which serve as guides and bearings of moved elements. On this basis active linear guides for micro systems are developed.
DFG Programme
Collaborative Research Centres
Completed projects
- A01 - Auslegung aktiver Mikrosysteme (Project Heads Gatzen, Hans-Heinrich ; Ponick, Bernd )
- A03 - Modulare rechnerunterstützte Entwurfsumgebung für aktive Mikrosysteme (Project Heads Büttgenbach, Stephanus ; Franke, Hans-Joachim )
- A5 - Steuerung und Regelung aktiver Mikrosysteme (Project Heads Hesselbach, Jürgen ; Stölting, Hans-Dieter )
- A06 - Steuerung und Regelung aktiver Mikrosysteme (Project Head Mertens, Axel )
- B01 - Fertigung magnetischer Schichten für elektromagnetische Mikroaktoren (Project Heads Bräuer, Günter ; Gatzen, Hans-Heinrich ; Ruffert, Christine )
- B2 - Fertigung von Erregerspulen für elektromagnetische Mikroaktoren (Project Heads Büttgenbach, Stephanus ; Gatzen, Hans-Heinrich )
- B03 - Spanende Mikrobearbeitung (Project Heads Denkena, Berend ; Hoffmeister, Hans-Werner )
- B04 - Sensorführung von Mikromontageprozessen (Project Heads Hesselbach, Jürgen ; Raatz, Annika ; Tutsch, Rainer )
- B05 - Baueinheiten zur Montage aktiver Mikrosysteme (Project Heads Büttgenbach, Stephanus ; Hesselbach, Jürgen )
- B06 - Geometrische Messtechnik (Project Heads Brand, Uwe ; Koenders, Ludger ; Wilkening, Günter )
- B07 - Fertigung von Funktionskomponenten für elektromagnetische Mikroaktoren (Project Heads Büttgenbach, Stephanus ; Gatzen, Hans-Heinrich )
- B08 - Klebstoffverarbeitung in Batch-Technologie zur Fertigung von Mikrosystemen (Project Heads Böhm, Stefan ; Dilger, Klaus ; Raatz, Annika )
- C01 - Verschleißverhalten bei Mikrokomponenten (Project Heads Bräuer, Günter ; Gatzen, Hans-Heinrich )
- C02 - Reibungsverhalten bei Mikroführungen (Project Heads Bräuer, Günter ; Büttgenbach, Stephanus )
- C03 - Aktive Linearführungen für Mikrosysteme (Project Head Denkena, Berend )
- C05 - Wegmesstechnik (Project Heads Koenders, Ludger ; Kolleck, Christian ; Ostendorf, Andreas ; Wilkening, Günter )
- T01 - Aufbau eines bistabilen Mikroventils für medizinische Anwendungen (Project Heads Leester-Schädel, Monika ; Seidel, Helmut )
- T02 - Aufbau eines größenangepassten Handhabungsgerätes mit Mikroantriebstechnik für die Mikromontage (Project Heads Hesselbach, Jürgen ; Raatz, Annika )
- T03 - Automatisierte optische BGA Inspektion - AUTOBIN (Project Head Tutsch, Rainer )
- Z - Zentrale Aufgaben (Project Head Büttgenbach, Stephanus )
Applicant Institution
Technische Universität Braunschweig
Participating University
Gottfried Wilhelm Leibniz Universität Hannover
Participating Institution
Fraunhofer-Institut für Schicht- und Oberflächentechnik (IST); Laser Zentrum Hannover e.V. (LZH); Physikalisch-Technische Bundesanstalt (PTB)
Spokespersons
Professor Dr. Stephanus Büttgenbach; Professor Dr.-Ing. Jürgen Hesselbach, until 6/2006