BEOL-Compatible 3D Reconfigurable Logic (A05)

• Subject Area: Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
• Term: since 2025
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 528378584

Reconfigurable field effect transistors (RFETs) that can change their polarity between n-type and p-type during runtime show great promises for increasing the complexity of integrated circuits beyond the possibilities of traditional scaling. Since RFETs are based on Schottky-barriers the lower crystal quality of the BEOL-compatible channels is expected to have a lower impact on the characteristics as compared to other logic devices, making them an inherent beneficial device for monolithic BEOL integration. So far, both the groups in Dresden and Aachen did groundbreaking work on nanoscale Schottky-barrier FETs and specifically RFETs. On this basis the role of this project will be to go one step further and explore the third dimension while state-of-the-art devices are still bound to the FEOL integration. From Phase 2 onward the co-design with memory elements will be explored.

• DFG Programme: CRC/Transregios
• Subproject of: TRR 404: Next Generation Electronics with Active Devices in Three Dimensions (Active-3D)
• Applicant Institution: Technische Universität Dresden
• Co-Applicant Institution: Rheinisch-Westfälische Technische Hochschule Aachen
• Project Heads: Professor Dr. Joachim Knoch; Dr.-Ing. Jens Trommer