Recyclable opto-electronic devices through the reversible deposition and removal of functional layers with atomic precision (F06)

• Subject Area: Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering ; Solid State and Surface Chemistry, Material Synthesis
• Term: since 2025
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 538767711

Project F6 addresses recycling of semiconductors in devices by exploiting novel sALD techniques (with C1, F4) to deposit and remove layers with atomic-level precision, exploiting tools developed in C3. The deposition and removal techniques are especially relevant for thin interface layers that are used for passivation or carrier selection. Additionally, such techniques will be highly relevant for all applications in which very thin layers of toxic or precious materials are used. We will explore the economic and sustainability implications by tracking material, energy and capital flows to establish the boundary conditions for such a process becoming industrially relevant.

• DFG Programme: Collaborative Research Centres
• Subproject of: SFB 1719: Next-generation printed semiconductors: Atomic-level engineering via molecular surface chemistry
• Applicant Institution: Friedrich-Alexander-Universität Erlangen-Nürnberg
• Project Head: Dr. Ian Marius Peters, since 7/2025