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Institution

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Technische Universität Ilmenau
Fakultät für Maschinenbau
Fachgebiet Mikromechanische Systeme

Address Max-Planck-Ring 12
98693 Ilmenau
Deutschland

GERiT This institution in GERiT

98693 Ilmenau

Projects

Research Grants
- Current projects
  - Nanoscale Scanning Tip-based Electron Beam Induced Deposition from the Gas-phase for Highly Localized 3D Material Deposition (TEBID)
    (Applicant Strehle, Steffen )
- Completed projects
  - Modelling and technological expansion of nanowire surface-controlled contact printing
    (Applicant Strehle, Steffen )
  - REal-GAs effects on Loss mechanisms of ORC turbine flows (REGAL-ORC)
    (Applicants Strehle, Steffen ; aus der Wiesche, Stefan )
Research Fellowships
- Completed projects
  - Modification of silicon based nanowires by selective self-limiting surface reactions
    (Applicant Strehle, Steffen )
Major Research Instrumentation
- Completed projects
  - System for 3D femtosecond laser-based micromachining
Research Training Groups
- Current projects
  - GRK 2182: Tip- and laser-based 3D-Nanofabrication in extended macroscopic working areas
    (Spokespersons Manske, Eberhard ; Strehle, Steffen )

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