Project Details

Professor Dr.-Ing. Eberhard Manske

Address Technische Universität Ilmenau
Fakultät für Maschinenbau
Institut für Prozessmess- und Sensortechnik
Post Office Box 10 05 65
98684 Ilmenau

Projects

As Applicant
- Current projects
  - Scanning beam interference lithography for spatial structures (Research Grants)
  - Dynamic and high precision sensor and tool positioning in large measuring volume with the aid of an inverse measurement concept - transfer project (Research Grants)
- Completed projects
  - stabilized Nd:YAG based two-wavelength-two-frequency-lasers for refraction corrected length measurement (Research Grants)
  - Highly resolved edge detection and localization of micro structures using optical 3D measurements and simulations (Research Grants)
  - Dynamic and high precision sensor positioning in large measuring ranges by means of an inverse measuring concept (Research Grants)
  - High-precision Pico-AFM for nanometrology and nanofabrication (Research Grants)
  - 3D-characterization of micro balls with nanometer precision (Research Grants)
  - Development of holistic measurement concepts for highly resolved measurement of micro structures based on scanning and imaging optical techniques (Research Grants)
As Leader
- Completed projects
  - Nanopositionier- und Nanomessmaschine (Major Research Instrumentation)
  - Nanofabrikationsmaschine (Major Research Instrumentation)
As Spokesperson
- Current projects
  - GRK 2182: Tip- and laser-based 3D-Nanofabrication in extended macroscopic working areas (Research Training Groups)
- Completed projects
  - SFB 622: Nanopositioning- and Nanomeasuring Machines (Collaborative Research Centres)
As Participating Researcher
- Completed projects
  - GRK 1567: Lorentz Force Velocimetry and Lorentz Force Eddy Current Testing (Research Training Groups)
As Project Head
- Completed projects
  - Konstruktion, Aufbau und Erprobung der Maschine (Collaborative Research Centres)
  - metrology of NPM-machines (Collaborative Research Centres)
  - Nano measuring technique (Collaborative Research Centres)
  - Integrated Research Training Group (Collaborative Research Centres)
  - Zentrale Aufgaben für den SFB (Collaborative Research Centres)
As Participating Person
- Completed projects
  - Scientific Fundamentals for the Realization and Measurement of Small Torques - Development of a Torque Standard Machine for Small Torques with Reduced Uncertainty - DEBRATOR 2 (Research Grants)

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Hauptnavigation

Professor Dr.-Ing. Eberhard Manske

Additional Information

Servicenavigation

Hauptnavigation

Professor Dr.-Ing. Eberhard Manske

Additional Information

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