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Institution

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Technische Universität Chemnitz
Fakultät für Elektrotechnik und Informationstechnik
Zentrum für Mikro- und Nanotechnologien

Address Reichenhainer Straße 70
09126 Chemnitz
Deutschland

GERiT This institution in GERiT

09126 Chemnitz

Projects

Research Grants
- Current projects
- Completed projects
Collaborative Research Centres
- Completed projects
  - Applikative Systemlösungen
    (Project Heads Bocklisch, Steffen F. ; Ebest, Gunter ; Geßner, Thomas ; Radehaus, Christian )
  - Neue Technologieplattform für die "Oberflächennahe Silizium-bulk-Mikromechanik"
    (Project Head Geßner, Thomas )
  - Niedertemperaturbonden für rekonfigurierbare Resonatorarrays
    (Project Head Hiller, Karla )
  - Positioniersystem
    (Project Heads Dietzsch, Michael ; Dötzel, Wolfram ; Geßner, Thomas ; Manthey, Wolfgang )
  - SFB 379: Micromechanical Sensor and Actuator Arrays
    (Spokesperson Geßner, Thomas )
Major Research Instrumentation
- Completed projects
Research Units
- Completed projects
  - Actuators and sensors based on multifunctional nanomembranes
    (Applicants Otto, Thomas ; Schmidt, Oliver G. )
  - From the preparation of molecular layers and their (magneto-)optical investigation towards laterally stacked devices
    (Applicant Salvan, Georgeta )
  - Highly miniaturised fatigue test platform for thermo-mechanical and reliability characterisation of heterogeneously and bottom-up integrated nanofunctionalised components.
    (Applicants Hiller, Karla ; Wunderle, Bernhard )
  - Modellierung von Nanodevices
    (Applicant Geßner, Thomas )
  - MOS detection for nano resonators
    (Applicant Horstmann, John Thomas )
  - Sensor devices based on integrated, functionalized carbon nanotubes
    (Applicant Schulz, Stefan E. )
  - Zentralprojekt
    (Applicant Hiller, Karla )
Priority Programmes
- Current projects
  - Nanomaterial-based platform electronics for PUF circuits with extended entropy sources
    (Applicants Hermann, Sascha ; Katzenbeisser, Stefan ; Kavun, Ph.D., Elif Bilge )
International Research Training Groups
- Completed projects
  - GRK 1215: Materials and Concepts for Advanced Interconnects
    (Spokesperson Geßner, Thomas )
Clusters of Excellence
- Completed projects
  - EXC 1075: Merge Technologies for Multifunctional Lightweight Structures - MERGE
    (Spokesperson Kroll, Lothar )

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